发明名称 PBNZT ferroelectric film, sol-gel solution, film forming method and method for producing ferroelectric film
摘要 To provide a PBNZT ferroelectric film capable of preventing sufficiently oxygen ion deficiency. The PBNZT ferroelectric film according to an embodiment of the present invention is a ferroelectric film including a perovskite-structured ferroelectric substance represented by ABO3, wherein the perovskite-structured ferroelectric substance is a PZT-based ferroelectric substance containing Pb2+ as A-site ions and containing Zr4+ and Ti4+ as B-site ions, and the A-site contains Bi3+ as A-site compensation ions and the B-site contains Nb5+ as B-site compensation ions.
申请公布号 US9431242(B2) 申请公布日期 2016.08.30
申请号 US201013522824 申请日期 2010.07.23
申请人 YOUTEC CO., LTD. 发明人 Kijima Takeshi;Honda Yuuji
分类号 H01L41/00;H02N2/00;H01L21/02;C01G23/00;C01G33/00;C23C18/12 主分类号 H01L41/00
代理机构 Wenderoth, Lind & Ponack, L.L.P. 代理人 Wenderoth, Lind & Ponack, L.L.P.
主权项 1. A PBNZT ferroelectric film that is a ferroelectric film comprising a perovskite-structured ferroelectric substance represented by (Pb1-XBiX)((TiZr)1-YNbY)O3, wherein: X is 0.05 to 0.1; and Y is 0.05 to 0.1.
地址 Chiba JP
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