发明名称 |
PBNZT ferroelectric film, sol-gel solution, film forming method and method for producing ferroelectric film |
摘要 |
To provide a PBNZT ferroelectric film capable of preventing sufficiently oxygen ion deficiency. The PBNZT ferroelectric film according to an embodiment of the present invention is a ferroelectric film including a perovskite-structured ferroelectric substance represented by ABO3, wherein the perovskite-structured ferroelectric substance is a PZT-based ferroelectric substance containing Pb2+ as A-site ions and containing Zr4+ and Ti4+ as B-site ions, and the A-site contains Bi3+ as A-site compensation ions and the B-site contains Nb5+ as B-site compensation ions. |
申请公布号 |
US9431242(B2) |
申请公布日期 |
2016.08.30 |
申请号 |
US201013522824 |
申请日期 |
2010.07.23 |
申请人 |
YOUTEC CO., LTD. |
发明人 |
Kijima Takeshi;Honda Yuuji |
分类号 |
H01L41/00;H02N2/00;H01L21/02;C01G23/00;C01G33/00;C23C18/12 |
主分类号 |
H01L41/00 |
代理机构 |
Wenderoth, Lind & Ponack, L.L.P. |
代理人 |
Wenderoth, Lind & Ponack, L.L.P. |
主权项 |
1. A PBNZT ferroelectric film that is a ferroelectric film comprising a perovskite-structured ferroelectric substance represented by (Pb1-XBiX)((TiZr)1-YNbY)O3, wherein:
X is 0.05 to 0.1; and Y is 0.05 to 0.1. |
地址 |
Chiba JP |