| 摘要 |
PROBLEM TO BE SOLVED: To ensure that a single vacuum pump deals with pressure reducing operation of all chambers in a sheet-like substrate drying device including a multi-chamber type reduced pressure dryer.SOLUTION: A reduced pressure dryer comprises: a plurality of pressure reducing chambers; a single vacuum pump of which a suction port is connected to the respective chambers via pipes; valves that control exhaust and reduced pressure conditions of the respective chambers and that are provided in the respective pipes so as to correspond to the respective chambers; and a control device that controls the respective valves in accordance with a predetermined pressure reducing sequence.SELECTED DRAWING: Figure 1 |
