发明名称 MEMS SENSOR OFFSET COMPENSATION WITH STRAIN GAUGE
摘要 An example system comprises a microelectromechanical system (MEMS) sensor, a strain gauge, and a strain compensation circuit. The MEMS sensor is operable to generate a sensor output signal that corresponds to a sensed condition (e.g., acceleration, orientation, and/or pressure). The strain gauge is operable to generate a strain measurement signal indicative of a strain on the MEMS sensor. The strain compensation circuit is operable to modify the sensor output signal to compensate for the strain based on the strain measurement signal. The strain compensation circuit stores sensor-strain relationship data indicative of a relationship between the sensor output signal and the strain measurement signal. The strain compensation circuit is operable to use the sensor-strain relationship data for the modifying of the sensor output signal. The modification of the sensor output signal comprises one or both of: removal of an offset from the sensor signal, and application of a gain to the sensor signal.
申请公布号 US2016258825(A1) 申请公布日期 2016.09.08
申请号 US201514635205 申请日期 2015.03.02
申请人 InvenSense, Inc. 发明人 Gurin Ilya;Seeger Joe
分类号 G01L1/18;G01D18/00 主分类号 G01L1/18
代理机构 代理人
主权项 1. A system comprising: a microelectromechanical system (MEMS) sensor operable to generate a sensor output signal that corresponds to a sensed condition; a strain gauge operable to generate a strain measurement signal indicative of a strain on the MEMS sensor; and a strain compensation circuit, wherein the strain compensation circuit is operable to modify the sensor output signal to compensate for the strain based on the strain measurement signal.
地址 San Jose CA US
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