| 发明名称 |
STRAIN SENSING ELEMENT, PRESSURE SENSOR, AND MICROPHONE |
| 摘要 |
According to one embodiment, a strain sensing element provided at a deformable film part, includes a stacked body, a first electrode, and a second electrode. The stacked body includes a first magnetic layer, a second magnetic layer, and an intermediate layer provided between the first magnetic layer and the second magnetic layer. A magnetization direction of the first magnetic layer changes in accordance with a deformation of the film part. The first electrode includes a first alloy layer including a first alloy including Ta and Mo. The first electrode is electrically connected to the stacked body. The second electrode is electrically connected to the stacked body. |
| 申请公布号 |
US2016258824(A1) |
申请公布日期 |
2016.09.08 |
| 申请号 |
US201514925494 |
申请日期 |
2015.10.28 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
FUJI Yoshihiko;HORI Akio;MASUNISHI Kei;FUKUZAWA Hideaki;YUZAWA Akiko;OKAMOTO Kazuaki |
| 分类号 |
G01L1/12 |
主分类号 |
G01L1/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A strain sensing element to be provided at a deformable film part, the element comprising:
a stacked body including a first magnetic layer, a second magnetic layer, and an intermediate layer provided between the first magnetic layer and the second magnetic layer, a magnetization direction of the first magnetic layer configured to change in accordance with a deformation of the film part; a first electrode including a first alloy layer including a first alloy including Ta and Mo, the first electrode being electrically connected to the stacked body; and a second electrode electrically connected to the stacked body. |
| 地址 |
Tokyo JP |
