CONTACT PROBE

摘要

A contact probe includes a stylus, a spring, a magnetic body, and a permanent magnet. The stylus is displaceable in an X direction and a tip of the stylus makes contact with a measured object. A first end of the spring is fixated and a second end provides spring force along the X direction. A position of the magnetic body is fixated with respect to the stylus. The permanent magnet is arranged separated from the magnetic body so as to generate a magnetic force along the X direction between the magnetic body and the permanent magnet.

主权项

1. A contact probe comprising:
a stylus having a tip at a first end thereof and displaceable in a first direction such that the tip is contactable with an object to be measured; a spring having a fixed first end and a second end configured to apply force to the stylus along the first direction; a first magnet fixed to a second end of the stylus; and a second magnet separately provided from the first magnet so as to generate a magnetic force along the first direction between the first magnet and the second magnet.