| 发明名称 | Segmented mirror apparatus for imaging and method of using the same | ||
| 摘要 | An apparatus for inspecting a photomask, comprising an illumination source for generating a light which illuminates a target substrate, objective optics for receiving and projecting the light which is reflected from the target substrate, the objective optics includes a first mirror arranged to receive and reflect the light which is reflected from the target substrate, a second mirror which is arranged to receive and reflect the light which is reflected by the first mirror, a third mirror which is arranged to receive and reflect the light which is reflected by the second mirror, and a segmented mirror which is arranged to receive and reflect the light which is reflected by the third mirror. The segmented mirror includes at least two mirror segments. The apparatus further includes at least one sensor for detecting the light which is projected by the objective optics. | ||
| 申请公布号 | US9448343(B2) | 申请公布日期 | 2016.09.20 |
| 申请号 | US201313837765 | 申请日期 | 2013.03.15 |
| 申请人 | KLA-Tencor Corporation | 发明人 | Kvamme Damon;Chilese Frank |
| 分类号 | G01N21/88;G02B5/08;G02B5/09;G03F1/84;G01N21/956 | 主分类号 | G01N21/88 |
| 代理机构 | Simpson & Simpson, PLLC | 代理人 | Simpson & Simpson, PLLC |
| 主权项 | 1. An apparatus for inspecting a photomask using a light, comprising: an illumination source for generating the light which illuminates a target substrate; objective optics for receiving and projecting the light which is reflected from the target substrate, the objective optics comprising: a first mirror which is arranged to receive and reflect the light which is reflected from the target substrate;a second mirror which is arranged to receive and reflect the light which is reflected by the first mirror;a third mirror which is arranged to receive and reflect the light which is reflected by the second mirror; and,a segmented mirror which is arranged to receive and reflect the light which is reflected by the third mirror, wherein the segmented mirror comprises at least two mirror segments; the apparatus further comprising at least one sensor for detecting the light which is projected directly by the objective optics to the at least one sensor, wherein a respective mirror segment in the segmented mirror supports the imaging of a sub-field equal to a size of a single time delay integration sensor. | ||
| 地址 | Milpitas CA US | ||