Optical image capturing module, aligning method, and observing method

摘要

A method of aligning an upper substrate and a lower substrate is provided. The upper and lower substrates are oppositely arranged, and the aligning method includes the following steps: providing an optical image capturing module; emitting light rays to a third surface of a first prism; filtering the light rays, so that the light rays are divided into light rays at the first wavelength range and light rays at the second wavelength range, wherein the light rays at the first wavelength range irradiate a pattern on the upper substrate, and light rays at the second wavelength range irradiate a pattern on the lower substrate; reflecting a pattern image on the upper substrate to an image capturing apparatus; reflecting a pattern image on the lower substrate to the image capturing apparatus; and determining locations of the patterns of the upper and lower substrate that are on the image capturing apparatus.

主权项

1. An optical image capturing module, comprising:
a first prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the first prism are equal; a second prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the second prism are equal, and the second surface of the second prism is adjacent to the first surface of the first prism; a third prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the third prism are equal, and the first surface of the third prism is adjacent to the second surface of the first prism; a fourth prism, having a first surface and a second surface of which section lengths are equal, wherein the first surface of the fourth prism is adjacent to the second surface of the third prism, and the second surface of the fourth prism is adjacent to the first surface of the second prism; a first wavelength-selective medium, arranged on the third surface of the second prism, wherein the first wavelength-selective medium permits light rays at a first wavelength range greater than a cut-off wavelength to penetrate, and light rays at a second wavelength range less than the cut-off wavelength to reflect; a second wavelength-selective medium, arranged on the third surface of the third prism, wherein the second wavelength-selective medium permits light rays at the second wavelength range less than the cut-off wavelength to penetrate, and light rays at the first wavelength range greater than the cut-off wavelength to reflect; a beam splitting coating film group, having a plurality of coating films, separately arranged between the first surface of the first prism and the second surface of the second prism, between the first surface of the second prism and the second surface of the fourth prism, between the first surface of the fourth prism and the second surface of the third prism, and between the first surface of the third prism and the second surface of the third prism; a light source, emitting light rays to the third surface of the first prism; and an image capturer, oppositely arranged with the third surface of the first prism.