| 摘要 |
PROBLEM TO BE SOLVED: To provide an extension device capable of suppressing dew condensation near a carrying-in/carrying-out port.SOLUTION: An extension device (2) comprises: frame holding means (26, 28) for holding an annular frame (25) of a frame unit (1); tape extending means (18, 20) for extending a protective tape (23) blocking an opening of the annular frame held by the frame holding means; a chamber (4) including a carrying-in/carrying-out port (4a) allowing passage of the frame unit and shielding means (8) for shielding the carrying-in/carrying-out port, and housing the frame holding means and the tape extending means therein; and cooling means (6, 36) for cooling the inside of the chamber. The shielding means further includes a shield door (10) covering the carrying-in/carrying-out port of the chamber, and moving means (12) for moving the shield door between the shielding position for shielding the carrying-in/carrying-out port and an opening position for opening the carrying-in/carrying-out port. The shield door is composed of a resin plate-like object (42) including a hollow region (42d) therein.SELECTED DRAWING: Figure 1 |
