APPARATUS FOR FABRICATING LIQUID CRYSTAL DISPLAY PANE

摘要

A device for manufacturing a liquid crystal display panel is provided to improve the reliability and production yield of the dray etching process. A chamber(110) performs a dry etching process using plasma. A high frequency power generator(120) supplies the high frequency power for generating the plasma to the chamber. An etching gas feed port(160) supplies the etching gas to the chamber. A chuck(111) includes a plurality of separately controllable cooling channels. The chuck plays a role of controlling the temperature of the substrate by fixing the substrate on the bottom electrode(135) by using the power of the static electricity.