| 摘要 |
<P>PROBLEM TO BE SOLVED: To find a novel possibility for generating a gas curtain in the immediate vicinity of radiating plasma to permit a simple arrangement and configuration and a long life of a device for forming the gas curtain even under extreme thermal stress. <P>SOLUTION: A slit nozzle 1 forming an ultrasonic nozzle profile (11) for the formation of a broad and flat gas curtain (18; 19) is assembled of a plurality of partial bodies (14, 15; 2), and the partial bodies comprise different materials in order to accommodate the slit nozzle (1) to satisfy various thermal and precision-mechanical requirements in a gas inlet (14) and in a gas outlet (15). <P>COPYRIGHT: (C)2009,JPO&INPIT |
