| 摘要 |
PURPOSE:To practically produce an AlN substrate in a high yield. CONSTITUTION:An AlN green sheet 1 punched into a specified size and contg. a sintering aid and an AlN green sheet 2 not contg. a sintering aid are prepared, severalsheets 1 are laminated, the sheet 2 is placed at the upper and lower parts, and the assembly is pressed and integrated to form unit laminate 3. Plural laminates 3 are put on one another, pressed and adhered, the obtained laminate 4 is debindered, heated in an inert gas atmosphere and sintered, and the plural sintered laminates 5 are separated from one another at the position corresponding to the sheet 2 to produce an AlN substrate. |
