| 摘要 |
PURPOSE:To enhance the detection sensitivity even with a low driving voltage and to eliminate the detection error of angular speed due to driving, through a simple structure. CONSTITUTION:The angular speed sensor comprises drive electrodes 4, 5 having an overlapping area invariant to the horizontal oscillation of an oscillation piece 2, and 6 pairs of detection electrodes 6a, 7a and 6b, 7b having an overlapping area variable to the horizontal oscillation of the oscillation piece 2. Angular speed of the oscillation piece 2 around the axis thereof is detected from the frequency component of differential capacity between the pairs of detection electrodes 6a, 7a and 6b, 7b at the time of oscillation of the oscillation piece 2. |
