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发明名称	MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号	JPH08107091(A)	申请公布日期	1996.04.23
申请号	JP19940274176	申请日期	1994.09.30
申请人	KYUSHU KOMATSU DENSHI KK;KOMATSU ELECTRON METALS CO LTD	发明人	NAKAYOSHI YUICHI;ISHII AKIHIRO;FUKUNAGA TOSHIYA
分类号	H01L21/304;H01L21/02;H01L27/12;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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