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发明名称
HEAT PROCESSOR
摘要
申请公布号
JPH10340834(A)
申请公布日期
1998.12.22
申请号
JP19970150647
申请日期
1997.06.09
申请人
TOKYO OHKA KOGYO CO LTD
发明人
NAGASAWA KOICHI;FUJIYAMA SHIGEMI;SAGO HIROHITO;SHIMAI FUTOSHI
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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