| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small and thin optical device with sufficient reliability without affecting a function of a micro-lens even in work for wiping off attachment such as dust. <P>SOLUTION: The optical device is provided with a photodetector chip having an active region 12 which is formed on a main face of a substrate 11 and in which a plurality of photodetectors are arranged, a circuit region 15 arranged on an outer peripheral part of the active region 12, a through conductor 19 disposed in a thickness direction of the substrate 11, and an external connection terminal 18 installed on a rear face confronted with the main face in the substrate 11 by connecting it to the through conductor 19, with a micro-lens 14 arranged on the active region 12 in accordance with the photodetector, a flattening film 22 which is formed on a main face of the photodetector chip so that it covers the micro-lens 14 and flattens unevenness of the micro-lens 14 and is formed of a transparent member whose refractive index is smaller than the micro-lens 14, and a transparent protection film 23 which is formed on the flattening film 22 and is formed of a transparent inorganic material transparent to visible light. <P>COPYRIGHT: (C)2009,JPO&INPIT |
