| 摘要 |
PROBLEM TO BE SOLVED: To correctly measure the temp. of the object to be coated in the process of coating at real time. SOLUTION: In a vacuum film deposition system, in a vacuum chamber 1, while the object 9 to be coated is rotated, a film of a target material is deposited on the surface of the object 9 to be coated, a thermocouple wire 23 measuring the temp. of the object 9 to be coated is inserted into the vacuum chamber 1 penetratingly to the inside and outside in such a manner that it is made freely rotatable around the rotary axial center of the object 9 to be coated, and the sensor part on the inner end side of the thermocouple wire 23 is connected to the object 9 to be coated.
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