WAFER LABELING EQUIPMENT TO EFFECTIVELY REMOVE POLLUTER IN LABELING REGION

摘要

PURPOSE: Wafer labeling equipment is provided to effectively remove polluter in a labeling region by using a cleaning unit. CONSTITUTION: A wafer labeling equipment comprises a wafer chuck(120) for loading a wafer(100), a wafer alignment unit(130) for aligning the wafer, a labeling unit(140) for forming labeling marks in a labeling region of the wafer, and a cleaning unit(155) for removing polluter in the labeling region. The cleaning unit(155) further includes a gas spray line(150) for spraying cleaning gas to the labeling region and a gas supply element(152) for supplying the cleaning gas.