| 摘要 |
A method for manufacturing a piezoelectric resonator element that ensures enough heat dissipation from a piezoelectric substrate, prevents a crack in the piezoelectric substrate, and avoids variation in an etching form when the piezoelectric resonator element is formed by dry etching the piezoelectric substrate is provided. The method includes a first step for placing a quartz crystal substrate 10 on a cooling plate 50 and dry etching the piezoelectric substrate from a main surface on one side that does not contact with the cooling plate 50 along an outline shape portion 20 having a shape along an outline of a tuning-fork crystal resonator element 1 in a cross-section direction of the quartz crystal substrate 10 , and a second step for placing a main surface on the one side dry etched in the first step facing the cooling plate 50 and the portion to be cut off contact with the cooling plate, and dry etching a main surface on the other side along the outline shape portion 20 in the cross-section direction of the quartz crystal substrate 10. |
