发明名称 3-DIMENSION IMAGE MEASUREMENT APPARATUS USING DEFFRACTION GRATING
摘要 Disclosed is a three-dimensional shape measuring device using a diffraction grating. The present invention comprises: a light divider installed in a light progression direction, generated from a light source part, to reflect a part of the light to a first route, and transmit a part of the light to a second route; an image sensor measuring a shape of a measurement object by receiving the light reflected from the measurement object including at least one hole by progressing to the first route; and a diffraction grating placed in at least one among a light route between the light source and the light divider, a light route between the measurement object and the light divider, and a light route between the measurement object and the image sensor. As such, the present invention is capable of improving a test speed while reducing a measurement error caused by vibration.
申请公布号 KR20160057510(A) 申请公布日期 2016.05.24
申请号 KR20140157805 申请日期 2014.11.13
申请人 KOH YOUNG TECHNOLOGY INC. 发明人 SER, JANG IL
分类号 G01B11/24 主分类号 G01B11/24
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