MASK PLATE CLEANING DEVICE AND MASK PLATE CLEANING METHOD THEREFOR

摘要

Provided are a mask plate cleaning device and a mask plate cleaning method. The mask plate cleaning method comprises: placing a mask plate (100) on an object stage (20); and within the cleaning time, ejecting dry ice particle groups comprising a plurality of dry ice particles (101) towards the surface of the mask plate at a speed of 340-1000 m/s, and the dry ice particles striking on the surface of the mask plate so as to remove contaminants on the surface of the mask plate. The mask plate cleaning device and the mask plate cleaning method can remove the contaminants on the surface of the mask plate without adding contaminating impurities and damaging the surface of the mask plate.