发明名称 |
Single stage charged particle beam energy width reduction system for charged particle beam system |
摘要 |
The present invention provides a charged particle beam device. The device comprises a first lens generating a crossover a second lens positioned after the crossover and an element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.
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申请公布号 |
US7468517(B2) |
申请公布日期 |
2008.12.23 |
申请号 |
US20040571345 |
申请日期 |
2004.09.02 |
申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERNRUFTECHNIK MBH |
发明人 |
FROSIEN JUERGEN;DEGENHARDT RALF;LANIO STEFAN;SCHOENECKER GERALD |
分类号 |
G21K1/08;H01J37/05;H01J37/153;H01J37/20;H01J37/21;H01J37/28;H01J49/28;H01J49/46 |
主分类号 |
G21K1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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