发明名称 化合物半導体装置及びその製造方法
摘要 An AlGaN/GaN HEMT includes a compound semiconductor laminated structure, a gate electrode formed above the compound semiconductor laminated structure, and a p-type semiconductor layer formed between the compound semiconductor laminated structure and the gate electrode, and the p-type semiconductor layer has tensile strain in a direction parallel to a surface of the compound semiconductor laminated structure.
申请公布号 JP5950643(B2) 申请公布日期 2016.07.13
申请号 JP20120062861 申请日期 2012.03.19
申请人 トランスフォーム・ジャパン株式会社 发明人 山田 敦史
分类号 H01L21/338;H01L21/20;H01L21/205;H01L21/28;H01L21/336;H01L29/778;H01L29/78;H01L29/786;H01L29/812 主分类号 H01L21/338
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