Semiconductor manufacturing apparatuses comprising bonding heads

摘要

A semiconductor manufacturing apparatus may include: a pickup unit configured to pick up a chip in a first region of the semiconductor manufacturing apparatus; a bonding head configured to receive the picked-up chip and configured to move from the first region to a top of a circuit board in a second region of the semiconductor manufacturing apparatus; and/or an optical unit configured to detect a bonding position on the circuit board while moving from the first region to the second region. A semiconductor manufacturing apparatus may include: a bonding head including a heater for heating a chip and bonding the chip onto a circuit board; and/or a cooling block, adjacent to the heater, through which cooling liquid flows. The cooling liquid may be removed from the cooling block while the heater generates heat. The cooling liquid may be supplied to the cooling block while the heater is cooled.

主权项

1. A semiconductor manufacturing apparatus, comprising:
a bonding head including a heater configured to heat a chip and bonding the chip onto a circuit board; a cooling block, adjacent to the heater, through which cooling liquid flows; a cooling device configured to supply the cooling liquid to the cooling block; and a valve between the cooling device and the cooling block; wherein the apparatus is configured to remove the cooling liquid from the cooling block while the heater generates heat, wherein the cooling device is further configured to supply the cooling liquid to the cooling block while the heater is cooled, wherein the valve is configured to be closed while the heater generates heat, wherein the valve is configured to be open while the heater is cooled, and wherein the apparatus is further configured to return to the cooling device, and to re-cool, the cooling liquid supplied to the cooling block.