SUBSTRATE WITH TRANSPARENT ELECTRODE AND METHOD FOR PRODUCING SAME

摘要

Provided is a substrate with transparent electrode, which is capable of achieving both acceleration of crystallization during a heat treatment and suppression of crystallization under a normal temperature environment. In the substrate with transparent electrode, a transparent electrode thin-film formed of a transparent conductive oxide is formed on a film substrate. An underlayer that contains a metal oxide as a main component is formed between the film substrate and the transparent electrode thin-film. The underlayer and the transparent electrode thin-film are in contact with each other. The transparent electrode thin-film is amorphous, and the base layer is dielectric and crystalline.

主权项

1. A substrate with transparent electrode in which a transparent electrode thin-film formed of a transparent conductive oxide is formed on a film substrate, wherein
an underlayer containing indium oxide as a main component is formed between the film substrate and the transparent electrode thin-film, the underlayer is in contact with the transparent electrode thin-film, the transparent electrode thin-film is amorphous, and the underlayer is dielectric and crystalline.