| 摘要 |
An analysis method using an electron microscope, detects by a first electronography detector an electron beam transmitted through or scattered by a sample to detect an ADF image of the sample, detects by a second electronography detector the electron beam passing through the first electronography detector to detect an MABF image, adjusts a focal point of the electron beam to be located on the film of the sample to obtain first and second electronographies by the first and second electronography detectors, respectively, adjusts the focal point of the electron beam to be located on the substrate of the sample to obtain third and fourth electronographies by the first and second electronography detectors, respectively, aligns positions of the second and fourth electronographies based on the first and third electronographies, and after the aligning, subtracts the fourth electronography from the second electronography to obtain an image of the film. |
| 主权项 |
1. An analysis method using an electron microscope that includes an electron source, a first electronography detector, and a second electronography detector, the analysis method comprising:
accelerating and irradiating an electron beam emitted from the electron source on a sample so that a focal point of the electron beam is located on the sample, wherein the sample includes a substrate that includes fluorine or an element lighter than fluorine, and a film formed on a surface of the substrate; detecting, by the first electronography detector, the electron beam transmitted through or scattered by the sample, to detect an ADF (Annular Dark-Field) image of the sample; detecting, by the second electronography detector, the electron beam passing through the first electronography detector, to detect an MABF (Middle-Angle Bright-Field) image, adjusting the focal point of the electron beam to be located on the film of the sample, to obtain a first electronography by the first electronography detector and a second electronography by the second electronography detector; adjusting the focal point of the electron beam to be located on the substrate of the sample, to obtain a third electronography by the first electronography detector and a fourth electronography by the second electronography detector; aligning positions of the second electronography and the fourth electronography, based on the first electronography and the third electronography; and after the aligning, performing an image computation to subtract the fourth electronography from the second electronography, to obtain an image of the film. |
