OPTICAL WAVEGUIDE TYPE PHASE MODULATOR AND OPTICAL CIRCUIT

摘要

PROBLEM TO BE SOLVED: To change the phase of light of a silicon waveguide under an ultra low temperature environment with low heat generation and locally.SOLUTION: An optical waveguide type phase modulator includes: a silicon waveguide 10 formed on a semiconductor substrate; an excitation optical waveguide 11 formed on the semiconductor substrate using a material having a wider band gap than silicon as the material of a core; a phase modulation region 14 formed on the semiconductor substrate to couple the excitation optical waveguide 11 with the silicon waveguide 10 optically with a wavelength absorbable by silicon; and diffusion prevention waveguides 12 and 13 formed in the silicon waveguide 10 before and after the phase modulation region 14 using an insulator as the material of the core.SELECTED DRAWING: Figure 1