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发明名称
METHOD FOR VAPOR-DEPOSITING COMPOUND AT HIGH RATE
摘要
申请公布号
JPH0372070(A)
申请公布日期
1991.03.27
申请号
JP19890208826
申请日期
1989.08.11
申请人
NISSHIN STEEL CO LTD
发明人
FUKUI YASUSHI;MIONO TADAAKI;KIKKO TOSHIHARU
分类号
C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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