| 摘要 |
<P>PROBLEM TO BE SOLVED: To make a stage lightweight, processing costs low by reduction of necessary precision area of a guide surface, and the total weight of a positioning device small. <P>SOLUTION: Disclosed is the positioning device which positions the stage 1 movable in a Y direction on a surface plate 2. At least two air pad units 3 are disposed at an X-directional end side and second end side of the stage respectively in the Y direction. Air pad units 3 disposed at the first end side are coupled to each other by a coupling member 13. First elastic members 11 are disposed on air pad units 3 disposed at the second end side respectively. A second elastic member 12 is disposed on the coupling member 13. Consequently, the stage 1 is supported by the first and second elastic members 11 and 12. <P>COPYRIGHT: (C)2009,JPO&INPIT |
