发明名称 PARTICLE DETECTION DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a detector system for resolving radiation from a ghost particle from radiation from an actual particle for discriminating between a particle and a ghost particle. <P>SOLUTION: The detector system outputs a plurality of detector signals corresponding to intensities of radiation being incident on a part of the detector system or the detector system outputs detector signals corresponding to intensities of radiation incident on the detector system. In the plurality of detector signals, radiation received from a ghost particle does not have levels higher than a prescribed threshold level respectively and, when radiation is received from a particle, an approximately same level above the threshold level is displayed. The detector system includes a radiation detector device for generating a first detector signal in response to radiation incident on a prescribed part and a radiation blocking assembly for preventing radiation not originating from a particle from being incident on the prescribed part of the detector device. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009016870(A) 申请公布日期 2009.01.22
申请号 JP20080257384 申请日期 2008.10.02
申请人 ASML NETHERLANDS BV 发明人 ONVLEE JOHANNES;GREVE PETER FERDINAND;FRANSSEN JOHANNES HENDRIKUS GERTRUDIS;VISSER RAYMOND;VERHAGEN ERWIN THEODORUS JACOBA
分类号 H01L21/027;G01N21/956 主分类号 H01L21/027
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