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发明名称
Wafer collecting method and system
摘要
申请公布号
GB2336032(A)
申请公布日期
1999.10.06
申请号
GB19990006155
申请日期
1999.03.17
申请人
* SHIN-ETSU HANDOTAI CO., LTD
发明人
TAKASHI * NIHONMATSU;SEIJI * HIRABAYASHI
分类号
B28D5/02;B28D5/00;B28D7/02;H01L21/00;H01L21/304;(IPC1-7):H01L21/00
主分类号
B28D5/02
代理机构
代理人
主权项
地址
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