| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing process, wherein the operation efficiency is enhanced while re-working and scrapping are reduced/eliminated. SOLUTION: Reticule boxes 130 and 140 allow mechanical scanning with wafer stepper libraries 110 and 120, so that automatic search of a desired reticule for operation of a specific water lot is possible. A wafer stepper 100 includes a plurality of display reading devices 152 and 162 aligned at least in slots 112 and 122 of some libraries 110 and 120, with each of reticule boxes 130 and 140 provided with a display which represents the reticule number.</p> |
