| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer tray which reduces the manufacturing cost and facilitates taking out a wafer with tweezers. SOLUTION: The wafer tray comprises a tray body 1 having a wafer housing area 4, and a lid 3 engaged with the tray body 1 at the side opposite to the wafer housing area 4 of the tray body 1 to close the upside of the wafer housing area 4. The lid 3 faces at the side of the wafer housing area 4 of the body 1. The body 1 includes an outer wall 5 surrounding the wafer housing area 4 and is integrated with at least the main portion of the lid 3. The lid 3 comprises a spring 2 for pressing a wafer to the tray body 1 and a stopper 6 for blocking the wafer from moving sideways. The outer wall 5 has wafer gripping notches 7a, 7b for exposing a part of the wafer's periphery to sideways. COPYRIGHT: (C)2005,JPO&NCIPI |
