发明名称 HORIZONTAL ARRAY STOCKER
摘要 The present invention comprises a stocker. The stocker comprises multiple container storage locations arranged in a horizontal array. The horizontal array of storage locations may be suspended from the facility ceiling or supported by the facility floor. The stocker may include one or more stocker robots for transporting a workpiece container within the stocker and/or to a material transport system. The stocker may also include features such as container elevators and conveyor loops.
申请公布号 WO2007051070(A2) 申请公布日期 2007.05.03
申请号 WO2006US42587 申请日期 2006.10.27
申请人 ASYST TECHNOLOGIES, INC.;ROGERS, THEODORE, W.;RIELY, NORMA 发明人 ROGERS, THEODORE, W.;RIELY, NORMA
分类号 H01L21/677 主分类号 H01L21/677
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