发明名称 FIELD EFFECT TRANSISTOR DEVICE AND METHOD OF PRODUCING THE SAME
摘要 A semiconductor device is disclosed. In one aspect, the device comprises a channel area, the channel area comprising a channel layer in which charge carriers can move when the transistor is turned on, in order to pass a current through the transistor. The device further comprises a source area and a drain area contacting the channel layer for providing current to and from the channel layer. The method further comprises a gate electrode, preferably provided with a gate dielectric between the gate electrode and the channel layer. The channel layer may comprise a III-V material, and the source and drain areas comprise SiGe, being SixGe1-x, with x between 0 and 100%, arranged so that heterojunctions are present between III-V material and SiGe, wherein the heterojunctions are oriented so as to intersect with the gate dielectric or the gate electrode.
申请公布号 US2008169485(A1) 申请公布日期 2008.07.17
申请号 US20070963615 申请日期 2007.12.21
申请人 INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC)VZW 发明人 HEYNS MARC;MEURIS MARC
分类号 H01L29/78;H01L21/20 主分类号 H01L29/78
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