| 摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, the catalyst-free substrate grown graphene, and a manufacturing device. The manufacturing method of catalyst-free substrate grown graphene of the present invention comprises the following steps: a. arranging a substrate; b. supplying carbon-containing gas and performing inductively coupled plasma-chemical vapor deposition (ICP-CVD); and c. growing graphene on the substrate without having a catalyst layer through van der Waals type heteroepitaxial growth. |
