METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND RECORDING MEDIUM

摘要

A method of manufacturing a semiconductor device includes forming a seed layer containing a metal element on a substrate by performing a first process and a second process in a time-division manner. The first process supplying and exhausting organic metal-containing gas containing the metal element to the substrate. The second process supplying and exhausting inorganic metal-containing gas containing the metal element to the substrate, and forming a metal-containing nitride film on the substrate on which the seed layer is formed using the seed layer as a seed by performing a third process and a fourth process in a time-division manner. The third process supplying and exhausting the inorganic metal-containing gas to the substrate. The fourth process supplying and exhausting nitrogen-containing gas to the substrate.

主权项

1. A method of manufacturing a semiconductor device comprising:
forming a seed layer containing a metal element on a substrate by performing a first process and a second process in a time-division manner a predetermined number of times, the first process supplying and exhausting organic metal-containing gas containing the metal element to the substrate, the second process supplying and exhausting inorganic metal-containing gas containing the metal element to the substrate; and forming a metal-containing nitride film on the substrate on which the seed layer is formed using the seed layer as a seed by performing a third process and a fourth process in a time-division manner a predetermined number of times, the third process supplying and exhausting the inorganic metal-containing gas to the substrate, the fourth process supplying and exhausting nitrogen-containing gas to the substrate.