发明名称 METHOD FOR ELECTRICAL COUPLING AND ELECTRIC COUPLING ARRANGEMENT
摘要 A method for electrically coupling a pad and a front face of a pillar, including shaping the front face pillar, the front face having at least partially a convex surface, applying a suspension to the front face or to the pad, wherein the suspension includes a carrier fluid, electrically conducting microparticles and electrically conducting nanoparticles, arranging the front face of the pillar opposite to the pad at a distance such that the carrier fluid bridges at least partially a gap between the front face of the pillar and the pad, evaporating the carrier fluid thereby confining the microparticles and the nanoparticles, and thereby arranging the nanoparticles and the microparticles as percolation paths between the front face of the pillar and the pad, and sintering the arranged nanoparticles for forming metallic bonds at least between the nanoparticles and/or between the nanoparticles and the front face of the pillar or the pad.
申请公布号 US2016351529(A1) 申请公布日期 2016.12.01
申请号 US201514933951 申请日期 2015.11.05
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION ;Intrinsiq Materials Ltd. ;Technische Universitaet Chemnitz ;SINTEF 发明人 Brunschwiler Thomas J.;Dixon Richard;Visser Taklo Maaike M.;Wunderle Bernhard;Yu Kerry;Zuercher Jonas
分类号 H01L23/00 主分类号 H01L23/00
代理机构 代理人
主权项 1. A method for electrically coupling a pad and a front face of a pillar, comprising: shaping the front face of the pillar, the front face having at least partially a convex surface; applying a suspension to the front face of the pillar or to the pad, wherein the suspension includes a carrier fluid, electrically conducting microparticles and electrically conducting nanoparticles; arranging the front face of the pillar opposite to the pad at a distance such that the carrier fluid bridges at least partially a gap between the front face of the pillar and the pad; evaporating the carrier fluid thereby confining the microparticles and the nanoparticles, and thereby arranging the nanoparticles and the microparticles as percolation paths between the front face of the pillar and the pad; and sintering the arranged nanoparticles for forming metallic bonds at least between one of the nanoparticles or between the nanoparticles and the front face of the pillar or the pad.
地址 Armonk NY US