Verfahren und Vorrichtung zur Erfassung von im Vakuumbereich liegenden Gasdrücken

摘要

The invention concerns a method of detecting gas pressures lying within the vacuum range in a gas compartment (2), wherein the gas compartment (2) is connected to a small-volume measuring cell (4) in a pressure-measuring device (1), such that the gas pressure prevailing in the gas compartment (2) is set in the measuring cell (4) and the gas pressure in the measuring cell (4) is measured by a sensor arrangement. The invention is characterized in that, before the pressure is measured, the gas pressure in the measuring cell (4) is increased in a specific manner in order to improve the measuring sensitivity of the pressure-measuring device (1) and extend the measuring range.