| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device having a sufficiently secured amount of displacement. <P>SOLUTION: The piezoelectric device 1 is equipped with slits 18 in non-actuator parts 12 present between actuator parts 11 arrayed in a direction orthogonal to the laminating direction of a laminate 2 and at the array end of the actuator parts 11, and the non-actuator parts 12 are displaced downwards in linkage with the deflection displacement of the actuator parts 11. Consequently, the binding force of the deflection displacement by the non-actuator parts 12 is mitigated and the amount of displacement of the deflection displacement is sufficiently secured. The slits 18 are simultaneously formed when sintering the laminate 2 by forming a ZrO2 paste pattern in the prescribed region of a green sheet and obstructing sintering reaction between the green sheets. A piezoelectric body 4 is therefore not damaged by working and the complication of manufacture processes is evaded. <P>COPYRIGHT: (C)2009,JPO&INPIT |
