| 摘要 |
PROBLEM TO BE SOLVED: To mount a plurality of ion sources on one mass spectrometer to realize speedy changeover of the ion sources and allow a plurality of measurements in parallel, by deflecting ions from any ion source of the plurality of ion sources toward the mass spectrometer. SOLUTION: When ions from a first and second ion sources 20, 40 simultaneously come into an electrostatic deflector 70, the ions from either source are deflected and fed into a mass spectrometer 82 through a narrow hole 73 in the electrostatic deflector. When an accelerating voltage is applied to an ion accelerating electrode 23 and an ion accelerating electrode 43 is set to a ground voltage, and ions from the first ion source 20 are selected and fed into the mass spectrometer 82, and in the inverse case, ions from the second ion source 40 are selected. Therefore, mass spectra from the plurality of ion sources are accumulated, and a measured ion source can be arbitrarily selected for mass spectrometry. Thus, one mass spectrometer can analyze the plurality of ion sources, the device can be downsized, and its cost is reduced. |
