| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding device for perpendicularly holding a square thin plate and hardly generating distortion in a measured material also by alignment work. SOLUTION: The holding device has holding members 22, 23 and 34 for holding a plurality of parts of the outer peripheral end surface of the square thin plate 100, the holding members 22, 23 and 34 have a plane abutting on and holding the end surface of the thin plate 100, the plane abuts on the end surface and contacts with it by micro pressure to enable holding. The holding device has a holding member pressure adjusting means for setting the micro pressure to be a pressure that is enough to perpendicularly hold the square thin plate 100 and is adjusted enough to allow sliding of the end surface of a held part along the holding member plane without applying strain to the square thin plate 100. COPYRIGHT: (C)2005,JPO&NCIPI |
