| 摘要 |
PROBLEM TO BE SOLVED: To provide an oscillator which uses an MEMS vibrator and automatically corrects a temperature-dependent characteristic of a frequency by using a temperature-dependent characteristic of an MEMS capacitor. SOLUTION: The oscillator is provided with: the mechanically vibrating MEMS vibrator; an output oscillation circuit which oscillates at a resonance frequency of the MEMS vibrator to output an oscillation signal; and the MEMS capacitor in which a distance between an anode electrode and a cathode beam changes according to an ambient temperature and a capacitance value changes. COPYRIGHT: (C)2008,JPO&INPIT
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