| 发明名称 |
EDGE RING FOR A SUBSTRATE PROCESSING CHAMBER |
| 摘要 |
An edge ring and process for fabricating an edge ring are disclosed herein. In one embodiment, an edge ring includes an annular body and a plurality of thermal breaks disposed within the annular body. The thermal breaks are disposed perpendicular to a center line of the annular body of the edge ring. |
| 申请公布号 |
WO2016099826(A1) |
申请公布日期 |
2016.06.23 |
| 申请号 |
WO2015US62410 |
申请日期 |
2015.11.24 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RAJ, GOVINDA;NARENDRNATH, KADTHALA R.;VASANTHA, BOPANNA ICHETTIRA;YAVELBERG, SIMON |
| 分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
| 代理机构 |
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