| 摘要 |
An oblique-incidence X-ray fluorescence analysis device (1) according to the present invention is provided with an X-ray source (2), a curved spectral element (4) for dispersing X-rays (3) from the X-ray source (2) and forming an X-ray beam (5) focused on a fixed position (15) on the surface of a sample (S), a slit (6) that is disposed between the curved spectral element (4) and sample (S) and has a linear opening (61), a slit movement means (7) for moving the slit (6) in a direction crossing the X-ray beam (5) passing through the linear opening (61), a glancing angle setting means (8) for setting the glancing angle (α) of the X-ray beam (5) to a desired angle by moving the slit (6) using the slit movement means (7), and a detector (10) for measuring the intensity of the X-ray fluorescence (9) emitted from the sample (S) irradiated by the X-ray beam (5). |
