发明名称 薄膜トランジスタ構造、ならびにその構造を備えた薄膜トランジスタおよび表示装置
摘要 There is provided an oxide semiconductor layer capable of making stable the electric characteristics of a thin-film transistor without requiring an oxidatively-treated layer when depositing a passivation layer or the like in display devices such as organic EL displays and liquid crystal displays. The thin-film transistor structure of the present invention at least having, on a substrate, an oxide semiconductor layer, a source-drain electrode, and a passivation layer in order from the substrate side, wherein the oxide semiconductor layer is a stacked product of a first oxide semiconductor layer and a second oxide semiconductor layer; the first oxide semiconductor layer has a Zn content of 50 atomic % or more as a percentage of all metal elements contained therein, and the first oxide semiconductor layer is formed on the source-drain electrode and passivation layer side; the second oxide semiconductor layer contains Sn and at least one element selected from the group consisting of In, Ga, and Zn, and the second oxide semiconductor layer is formed on the substrate side; and the first oxide semiconductor layer is in direct contact both with the source-drain electrode and with the passivation layer.
申请公布号 JP5977569(B2) 申请公布日期 2016.08.24
申请号 JP20120094747 申请日期 2012.04.18
申请人 株式会社神戸製鋼所 发明人 前田 剛彰;釘宮 敏洋
分类号 H01L29/786;C23C14/08;G02F1/1368;H01L21/336 主分类号 H01L29/786
代理机构 代理人
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