| 摘要 |
PROBLEM TO BE SOLVED: To provide a forming agent capable of forming a passivation film having a long carrier life time, and to provide a method of producing a passivation film, a passivation film, and a solar cell element using the same.SOLUTION: A passivation film forming agent is composed of an alkyl aluminum compound composed of dialkyl aluminum, trialkyl aluminum or their mixture, and a solution containing an electron-donating organic solvent not containing an active hydrogen atom. In a method of producing a silicon base material having a passivation film, the passivation film forming agent is applied in the form of droplets, having an average grain size of 1-100 μm, to at least a part of the back surface of the silicon base material, thus forming a coating film, the coating film is heated after drying the organic solvent or in parallel with the drying of the organic solvent, to form a passivation film of aluminum oxide. A silicon substrate having a passivation film produced by this method, and a solar cell element using the silicon substrate are also provided.SELECTED DRAWING: Figure 1 |
