| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas leakage inspection device that is not susceptible to the effect of heat due to the suction and exhaustion of a compressed gas, and that can inspect gas leakage in an inspection object accurately.SOLUTION: Provided is a gas leakage inspection device for inspecting gas leakage in an inspection object 5 having a hollow part, the inspection device including: preprocess action execution means for performing at least one of a first preprocess action for making a compressed gas pass through only a reference object 7 and a second preprocess action for making a compressed gas pass through both the reference object 7 and the inspection object 5 before the start of a gas leakage inspection for detecting gas leakage in an inspection object on the basis of a pressure difference between the pressure of a compressed gas introduced into the inspection object 5 and the pressure of a compressed gas introduced into the reference object 7 having a hollow part that serves as a point of reference for the inspection of gas leakage in the inspection object 5; and preprocess start operation means for making the preprocess action by the preprocess action execution means start.SELECTED DRAWING: Figure 1 |
