ACCELERATION SENSOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an acceleration sensor having a beam part the thickness of which varies to thereby prevent variation in amount of deflection in the beam part and is capable of outputting stable signals, and to provide a manufacturing method thereof.SOLUTION: The acceleration sensor has a beam part 12a, which includes: an active layer 20c formed over the upper face of the base layer 20a being interposed by an oxide film layer 20b; a first insulator layer 20d formed over the upper face of the active layer 20c; and a first metal layer 200b formed over the upper face of the first insulator layer 20d. The surface roughness of the lower plane of the beam part 12a: Ra=0.01 μm or less.SELECTED DRAWING: Figure 7