| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspection method and device capable of continuously inspecting a plurality of work, without being affected by heat generation due to adiabatic compression.SOLUTION: By closing an exhaust valve 36 and opening a first open/close valve 31-fourth open/close valve 34, pressurized gas is introduced from a compression air source 3 to pressurize a first space 51, a second space 52, a third space 53, a fifth space 55, and a fourth space 54 including work W on both sides of a differential pressure sensor 26 to be target pressure, and then the first open/close valve 31 and the fourth open/close valve 34 are closed to keep the first space 51 and the fifth space 55 in a sealing state. The work W is exchanged while the second open/close valve 32 and the third open/close valve 33 are close to seal the second space 52 and the third space 53, and the leak inspection of the work after the exchange is performed by pressurizing the fourth space 54 to be the target pressure again and opening the third open/close valve 33, and then opening the second open/close valve 32 to communicate the fourth space 54 to the second space through the third space 53.SELECTED DRAWING: Figure 2 |
