| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement measurement method and device which measure the thickness of a target substance inside a dielectric substance not transmitting visible light, and the depth and height of a fault and a foreign body inside the target substance.SOLUTION: A millimeter wave or a terahertz wave which is transmitted by a dielectric substance is used as an irradiation wave, so that the information of thickness, depth, and height of a measurement object is accurately acquired without attenuation of the irradiation wave by an interference wave of reflection waves from a measurement surface 108 and a reference surface 109.SELECTED DRAWING: Figure 1 |
